High Resolution Strain Sensor

High-resolution, low power strain sensors based on MEMS resonators

A resonant micromechanical device serves as a high-resolution strain sensor, exploiting the correlation between its mechanical resonance frequency and the applied force along its axis. Under such conditions, this frequency undergoes significant variations, analogous to a guitar string changing its tone when tuned. Manufactured using silicon micromachining techniques, the device is seamlessly integrated into a dedicated closed-loop electronic circuit, forming an ultra-low-noise oscillator locked at the fundamental mechanical resonance frequency of the microstructure. The oscillation frequency of this closed-loop circuit, incorporating the resonator, becomes a valuable sensing signal for strain.

Device mechanical resonance mode and resonator frequency shift due to the applied load

Resonator open-loop characteristics

Electrostatic actuation with sub-micrometer gap ensures significant resonance peak with minimal DC voltages, conveniently supplied by battery power.

A quality factor greater than 20,000 diminishes oscillator phase noise and augments the resolution of the strain sensor.

Resonator mechanical testing

Strain sensing technologies comparison

In the graph we can indicate the market positioning of our new and innovative strain sensor compared to sensors on the market by analyzing the different types, considering resolution, dimensions and costs to quickly understand if the application you are thinking of can benefit from our technology.


Technical datasheet

Sensor industrialization

Explore the possible application of our MEMS strain sensor




Many others applications we have been developed, but they are protected by patent and industrial secred, so we cannot display here...




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