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A commercial electrovalve has been enhanced with the high-resolution strain sensor to measure deformation caused by pressure on the valve surface. This setup provides valuable feedback on the valve performance.
Similarly to the case of the hydraulic gearmotor, the induced deformation on the external surface can be easily measured by monitoring the mechanical resonance frequency shift of the resonator. To address temperature drift resulting from varying coefficients of thermal expansion between the valve material and the silicon-based sensor, a digital temperature sensor is incorporated into the flexible PCB near the sensor.Â
Tests were conducted both under static pressure and dynamic conditions by manipulating the PWM control signal of the solenoid. The successful demonstration highlights how the MEMS sensor can offer feedback on parameters like flow rate, pressure, and temperature, enabling more precise control and monitoring of the system.
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